BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10‑8 mbar (1.2 x 105 to 1×10‑6 Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open.
The BGV Mk3 pneumatic gate valve works in the same way as the manual gate valve however the pneumatic valve has reed switches which can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs providing a visual display of the valve position.
Each BGV Mk3 pneumatic valve is fitted with a 24V d.c. solenoid and pre‑wired plug for direct connection to your Edwards latest generation vacuum pump (iHH, iXL, iXM and GXS). This 15‑way D-sub socket plug offers a single point of connection for both power to the solenoid and activating LEDs from the reed switch position indicators. 15-way “D” socket cable and reed switch position indictors are optionally supplied with BGV valves. However, length of the cable is about 50cm and a longer extension cable is required to connect to a pump or local controller.
In order to connect the BGV Mk3 pneumatic valve to Edwards legacy products the BGV Mk2 TIM interface cable should be used. The functionality of the LEDs is not available on legacy products (iGX, GX or iQ and iH via the iTIM module) as the pumps do not provide the DC 24V power to activate LEDs. However, the basic function of valve positioning indicator works for open and close as no power is required, and it is triggered by the magnetic field.
The simple but innovative wedge sealing mechanism, incorporating PEEK gliders, make the valve especially suited to applications with high levels of process by‑product in the gas stream:
BGV LOTO pneumatic gate valves include all the benefits of the standard BGV range, with LOTO safety feature and low power.
BGV LOTO gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV valves are also ideal for other applications where a 1 bar differential at opening is desirable.
The unique Lock‑Out‑Tag‑Out (LOTO) safety mechanism allows personnel to freely work on the vacuum system without fear of the valve inadvertently opening. The valve is physically held closed using a pin to lock the valve shut preventing it from being opened. If there is a requirement for the valve to be locked shut, a lockout hasp can be inserted through the LOTO pin and padlocked.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10‑9 mbar (1.2 x 105 to 1×10‑7 Pa). BGV valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed.
The low power actuation requirement at just 1 W enables direct connection to Edwards latest generation dry pumps range without any additional external power supply and facilitates ‘plug and play’ simple installation.
Reed switches can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs to provide a visual display of the valve position. Each valve is fitted with a 24V d.c. solenoid and pre‑wired plug for direct connection to your Edwards latest generation vacuum pump. This 15‑way “D” socket plug offers a single point of connection for both power to the solenoid and the signal from the reed switch position indicators. 15‑way “D” socket cable and reed switch position indicators are optionally supplied with BGV valves. However, length of the cable is about 50cm and a longer extension cable is required to connect to a pump or a local controller.
In order to connect the BGV LOTO pneumatic valve to Edwards legacy products the BGV TIM interface cable should be used. The functionality of the LEDs is not available on legacy products as the pumps don’t provide the DC 24V power to activate LEDs.
The simple but innovative wedge sealing mechanism, incorporating PEEK gliders, make the valve especially suited to applications with high levels of process by product in the gas stream:
The BGV LOTO pneumatic valve can be plugged directly into our latest generation of dry vacuum pumps allowing full functionality. Latest generation products include: iXH, iXL, iXM and GXS pumps.
In order to connect the BGV LOTO pneumatic valve to our legacy products the BGV Mk2 TIM interface cable should be used. Legacy products include: iGX, GX (or iQ and iH via the iTIM module) pumps.
The GV range of stainless steel, bellows sealed gate valves is designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere.
These superior quality valves offer high vacuum integrity coupled with maximum conductance. The valves are available with flange options of ISO, CF (metal sealed) for applications at ultra high vacuum requiring increased bake-out temperatures.
The stainless steel valve bodies are vacuum brazed, a special process which includes a bake-out at 1100 ˚C. This eliminates any possibility of virtual leaks and ensures a product with low outgassing characteristics.
A laser welded stainless steel bellows effectively seals the actuator from the valve. The concept provides ease of servicing and allows the gate and linkage mechanism to be removed while the valve remains in situ.
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