iXM – iXH – iXL series – ≡ Plasmadiam®

iXM – iXH – iXL series

Primary vacuum

Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment. Each range has been specifically designed to bring you advantages in environmental performance, reliability in harsh conditions and agility in light duty applications.

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iXM Dry Pump

Greener and more reliable with a lower cost of ownership

iXH Dry Pump

100 - 6.000 m³/h
More process capability
'Plug and Pump'
No routine maintenance

iXL Dry Pump

110 / 930 m³/h
0.013 / 0.001 mbar
Plug and Pump
<55 dB(A)
No routine maintenance

iXM series – low energy use, high performance

Edwards iXM low energy series dry pumps can bring real process improvements with increased uptime, reduced environmental impact and cost benefits for your most critical applications.

Energy efficient roots mechanism can reduce input power by up to 60%, reducing environmental impact and lowering cost of ownership
Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than our previous series
Compact and light-weight design, combined with exceptionally low noise and vibration, gives you more versatility
Available with Xcede technology for enhanced corrosion resistance
Advanced powder handling features deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes

iXH series for harsh environments

The iXH dry pump range sets new standards for harsh process capability, reliability and lower cost of ownership.

Wide temperature range allows you to optimise the pump for minimal by-product accumulation from condensation and plating
iXH Mk2 dry pumps provide even longer service life on the harshest of processes and can provide significant improvements in power efficiency
Innovative pump seal technology can lengthen process life and reduce your leakage risks
Available with Xcede technology for enhanced corrosion resistance

iXL series for light duty applications

The iXL series is a range of low energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology.

Fast chamber pump down and extremely low power usage
The iXL600(N) and iXL1000(N) dry pumps are among the smallest and quietest pumps available for light duty applications
The iXL600M and iXL1000M variants are process hardened and specially designed for dielectric (oxide) etch and other similar applications
The iXL600(N) and iXL1000(N) dry pumps feature high pumping speed and low energy consumption
A Green Mode allows reduced utilities usage during idle periods, lowering costs and helping to improve your environmental performance
The iXL900R is the fastest loadlock pump currently available in its class for FPD loadlock applications. Customers can significantly reduce their operating costs and installation times with this new pump, which is particularly well suited to the largest loadlock chambers used for plasma vapour deposition (PVD) applications. In addition, customers will need fewer pumps per loadlock chamber, which reduces installation time, systemisation costs, maintenance and utilities consumption.

iXH Technical Specifications

	Unit	iXH100	iXH610	iXH1210
Peak pumping speed	m³/h	100	665	1025
Ultimate pressure	mbar	0.02	0.005	0.005
Power at ultimate	kW	2.1	2.6	3.2
Power in Green Mode	kW	0.045	0.045	0.045
Noise at ultimate	dB(A)	63	64	64

iXL Technical Specifications

	Unit	iXL120N	iXL1000N
Peak Pumping Speed	m³/h	110	930
Ultimate Pressure	mbar	0.013	0.001
Power at Ultimate	kW	0.55	1
Power in Green Mode	kW	0.045	0.05
Noise at Ultimate	dB(A)	< 55	< 55

Components

Components