MaxCool Cryochillers

Improve vacuum

Edwards Polycold® MaxCool Cryochillers are closed loop cryogenic refrigeration systems that effectively capture water vapour, which comprises 65% to 95% of the residual gas in high vacuum systems. MaxCool Cryochillers are the most cost-effective upgrade that you can add to any diffusion-pumped, turbopumped, or helium-cryopumped system.

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Achieve lower vacuum levels quickly

These cryochillers can be used to capture water vapour and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool Cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing. The different models in our range provide 2,000, 2,500 or 4,000 watts of cooling.

Water Vapour Pumping

Water vapour is typically the most reactive contaminant present in high vacuum systems. With our MaxCool Cryochillers you can expect an increase in product throughput in your existing system of 20% to 100% and improve quality of deposition.

The MaxCool Advantage

High-vacuum pumpdown time cut by up to 75%
Increased product throughput of 20% to 100%
Lower water vapour partial pressure during processing for higher film quality, better adhesion and more reproducible deposition
Superior in cost/performance to liquid nitrogen cooled Meissners
Minimise cost of ownership with power management
High capacity cooling and heating for a wide variety of processes

Compliant with European Application Refrigerants (EC 1005/2009)

When added to your vacuum system, MaxCool Cryochillers can dramatically reduce pumpdown times and increase product throughput. The MaxCool will pump water vapour within minutes from start and can defrost in less than four minutes, giving true fast-cycle capability. It also has an option called Rapid Cool to Cool, which eliminates the waiting period after defrost, enabling your system to perform more production cycles per shift. Using patented Polycold® refrigerant mixtures, our MaxCool Cryochillers work on the principle of Meissner trapping. Water vapour is captured by condensation on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves and baffles. The cryocoil is easy to install and can be adapted to fit any system. It does not need a high vacuum valve.

Benefits

Increased productivity with rapid cool to cool option
Option for power management to minimize cost of ownership
Temperature control
Patented Green refrigerant charge is globally compliant, non-toxic and non-flammable
Based on Polycold®’s proven, innovative, dependable mixed gas refrigeration
Compliant to EU PED and MD
TUV Rheinland Listed to NRTL/CANADA Safety Standards
ISO 9001:2008 certified manufacturer

MaxCool models specifications

	MaxCool 2000	MaxCool 2500L	MaxCool 4000H
Maximum Cooling Capacity	2,000 W	2,500 W	4,000 W
Temperature at Maximum Cooling Capacity	-111 °C	-120 °C	-98 °C
Coldest Temperature	-142 °C	-145 °C	-133 °C
Ultimate Operating Pressure (25% of max pumping speed)	3E-9 torr	8E-10 torr	5E-8 torr
Typical Cold Trap Area	1.1 m2	1.4 m2	2.2 m2
Maximum Water Vapor Pumping Speed from Typical Cold Trap Area	163,900 l/s	208,600 l/s	327,800 l/s
Conservative Maximum Cold Trap Area*	1.5 m2	2.0 m2	2.8 m2
Electrical Consumption (Standby Mode)	5.5 kW	11.4 kW	12.0 kW
Electrical Consumption (Cool Mode, Typical Load)	6.2 kW	13.9 kW	12.4 kW
Electrical Consumption (Cool Mode, Max Load)	8.8 kW	19.2 kW	19.2 kW
Cooling water flow for 13 °C	6.8 l/min	15.1 l/min	15.1 l/min
Cooling water flow for 18 °C	9.1 l/min	18.2 l/min	18.2 l/min
Cooling water flow for 24 °C	13.6 l/min	27.3 l/min	27.3 l/min
Cooling water flow for 29 °C	27.6 l/min	54.1 l/min	54.1 l/min
European PED-Compliant	Yes	Yes	Yes
Nontoxic Refrigerants	Yes	Yes	Yes
Non-flammable Refrigerants	Yes	Yes	Yes

Components

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