Wide range of sizes, inlet flanges and special versions
The STP is trusted and relied upon by industrial and labotary customers worldwide
Exceptional 5-axis full maglev pump performance, with zero hydrocarbon lubrication
Automatic balancing systems, corrosion resistance versions, power failure protection
between services can be achieved with these pumps. No routine or preventive maintenance is required
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance. nEXT has been designed to combine all the latest technological advances in turbomolecular pumps offering pump sizes of 55, 85, 240, 300, 400, 730, 925 and 1250 l/s pumping speeds for Nitrogen these pumps provide end-user serviceability and deliver a truly class leading product.
This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:
The Ultra High Vacuum series offers unrivalled reliability, performance, cleanliness and class-leading low vibration levels:
| Unit | iX455 | iXR1606 | iXR1606 | iS2207 | iS2207 | iXA2206A | iXA3306C | iXA3306C | iXA4506C | |
| Inlet flange* | ||||||||||
| ISO | 100K/160K | 160F | 200F/250F | 200F | 250F | 250F | 250F | 320F | 320F | |
| ICF | – | 203 | 253/305 | 253 | 305 | 305 | 305 | 356 | – | |
| Pumping Speed | ||||||||||
| N2 | l/s | 300/450 | 1000 | 1600 | 1850 | 2200 | 2200 | 2650 | 3200 | 4000 |
| H2 | l/s | 300/460 | 800/ | 1200 | 700 | 750 | 1700 | 2050 | 2300 | 2700 |
| Ar | l/s | – | – | – | 1650 | 2000 | 1900 | 2300 | 2800 | 3400 |
| Compression ratio | ||||||||||
| N2 | >108 | >108 | >108 | >108 | >108 | >108 | >108 | >108 | >108 | |
| H2 | >1×104 | >1×104 | >1×103 | >1×103 | >1×103 | 1.0×104 | 2×103 | 2×103 | 1×103 | |
| Ultimate pressure | Pa | 6.5×10-6 | 6.5×10-6 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 |
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info@plasmadiam.com
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