On-Board® IS

Home ➔ Vacuum Pumps ➔ Cryopumps ➔ On-Board® IS

Improve vacuum

Edwards CTI-Cryogenics IS cryopump systems leverage innovative, high-efficiency technology to provide unparalleled vacuum performance and energy efficiency.

Unparalleled vacuum performance and energy efficiency

A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network.

Key Features

The patented distributed control system monitors and constantly adjusts individual elements of the cryopump system
Maintains optimal system-wide vacuum performance, delivering exceptional process consistency
Quickest regenerations in single and multi-pump configurations
Low consumption of energy and cooling water with no compromise in vacuum performance
Easy system integration
Fast production installation
Enhanced remote monitoring for both preventive and predictive maintenance

IS 320FX Cryopump

The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today’s Ion Implant processes, provides enhanced hydrogen pumping speed and capacity, while maintaining the quality, performance and reliability you have come to expect.

Specifically designed for Ion Implant applications
Optimised for tool throughput
Intelligent “self-adjusting” technology
Lower cost of ownership
Increased uptime

IS XP

The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. At the same time, it leverages the proven energy efficiency, consistent performance and low cost of ownership you have come to expect from the On-Board® IS.

Provides capacity overhead for future process improvements
Lower cost of ownership
Increased up-time
Intelligent “self-adjusting” technology for consistent vacuum performance

FR

FR