The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.
Spectra meets high performance with an environmental conscience
Abatement
Unique 4-stage combustion technology
Efficient SiH4 abatement
High H2 flow abatement capacity
Excellent management of high flows of NF3 / F2
High NH3 abatement capacity
Modular design of abatement and particulate management
80% powder removal efficiency
Acid gas scrubbing
Integrated wet scrubber
Water Recirculation Unit to optimise water consumption
Powder Capture
Spectra ZW2 – water cooled abatement with particulate removal
Modular Wet Electrostatic Precipitator (WESP)
Removal of 99% particulate
High powder load handling capability
Low cost of ownership relative to alternative solutions
